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Spectroscopy and Spectral Analysis, Volume. 29, Issue 11, 3134(2009)

Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath

ZHAO Wen-feng1,2、*, CHEN Jun-fang1, and MENG Ran1
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  • 1[in Chinese]
  • 2[in Chinese]
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    ZHAO Wen-feng, CHEN Jun-fang, MENG Ran. Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath[J]. Spectroscopy and Spectral Analysis, 2009, 29(11): 3134

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    Paper Information

    Received: Nov. 8, 2008

    Accepted: --

    Published Online: May. 26, 2010

    The Author Email: Wen-feng ZHAO (zwf555@scau.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology