Journal of Synthetic Crystals, Volume. 53, Issue 5, 792(2024)

Research on the Influence of Czochralski Process Parameters on Oxygen Content of N-Type Monocrystalline Silicon

CHAI Chen1、*, ZHANG Jun1, WANG Yulong2, HAN Qinghui1, and LI Huaiming1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(27)

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    CHAI Chen, ZHANG Jun, WANG Yulong, HAN Qinghui, LI Huaiming. Research on the Influence of Czochralski Process Parameters on Oxygen Content of N-Type Monocrystalline Silicon[J]. Journal of Synthetic Crystals, 2024, 53(5): 792

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    Paper Information

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    Received: Dec. 19, 2023

    Accepted: --

    Published Online: Aug. 22, 2024

    The Author Email: Chen CHAI (chaichen0304@163.com)

    DOI:

    CSTR:32186.14.

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