Chinese Journal of Lasers, Volume. 39, Issue 11, 1108002(2012)
Digital Moiré Technique for Thin Film Thickness Measurement
[1] [1] J. E. Greivenkamp, J. H. Bruning. "Phase Shifting Interferometers" in Optical Shop Testing[M]. D. Malacara ed. New York: John Wiley & Sons, Inc., 1992. 501~598
[2] [2] C. C. Hsu, J. Y. Lee, D. C. Su. Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry[J]. Thin Solid Films, 2005, 491(1-2): 91~95
[3] [3] A. Lewis. Measurement of length, surface form and thermal expansion coefficient of length bars up to 1.5 m using multiple-wavelength phase-stepping interferometry[J]. Meas. Sci. & Technol., 1994, 5(6): 694~703
[4] [4] Zhu Rihong, Chen Lei, Wang Qing et al.. Phase-shift interferometry and its application[J]. Journal of Applied Optics, 2006, 27(2): 85~88
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Su Junhong, Liu Yichen. Digital Moiré Technique for Thin Film Thickness Measurement[J]. Chinese Journal of Lasers, 2012, 39(11): 1108002
Category: measurement and metrology
Received: Jun. 20, 2012
Accepted: --
Published Online: Sep. 20, 2012
The Author Email: Junhong Su (sujunhong@xatu.edu.cn)