Chinese Journal of Lasers, Volume. 39, Issue 11, 1108002(2012)

Digital Moiré Technique for Thin Film Thickness Measurement

Su Junhong* and Liu Yichen
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  • [in Chinese]
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    References(6)

    [1] [1] J. E. Greivenkamp, J. H. Bruning. "Phase Shifting Interferometers" in Optical Shop Testing[M]. D. Malacara ed. New York: John Wiley & Sons, Inc., 1992. 501~598

    [2] [2] C. C. Hsu, J. Y. Lee, D. C. Su. Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry[J]. Thin Solid Films, 2005, 491(1-2): 91~95

    [3] [3] A. Lewis. Measurement of length, surface form and thermal expansion coefficient of length bars up to 1.5 m using multiple-wavelength phase-stepping interferometry[J]. Meas. Sci. & Technol., 1994, 5(6): 694~703

    [4] [4] Zhu Rihong, Chen Lei, Wang Qing et al.. Phase-shift interferometry and its application[J]. Journal of Applied Optics, 2006, 27(2): 85~88

    CLP Journals

    [1] Chen Chen, Liu Ke, Li Yanqiu, Wang Hai. Two-Dimensional Virtual Grating Phase Shifting Moire Fringe Method of Phase Extraction[J]. Chinese Journal of Lasers, 2015, 42(2): 208004

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    Su Junhong, Liu Yichen. Digital Moiré Technique for Thin Film Thickness Measurement[J]. Chinese Journal of Lasers, 2012, 39(11): 1108002

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 20, 2012

    Accepted: --

    Published Online: Sep. 20, 2012

    The Author Email: Junhong Su (sujunhong@xatu.edu.cn)

    DOI:10.3788/cjl201239.1108002

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