Chinese Journal of Lasers, Volume. 39, Issue 11, 1108002(2012)
Digital Moiré Technique for Thin Film Thickness Measurement
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Su Junhong, Liu Yichen. Digital Moiré Technique for Thin Film Thickness Measurement[J]. Chinese Journal of Lasers, 2012, 39(11): 1108002
Paper Information
Category: measurement and metrology
Received: Jun. 20, 2012
Accepted: --
Published Online: Sep. 20, 2012
The Author Email: Junhong Su (sujunhong@xatu.edu.cn)
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