Infrared and Laser Engineering, Volume. 51, Issue 11, 20220138(2022)
Ultraviolet photocatalytic-vibrated composite polishing
Fig. 1. Schematic diagram of photocatalytic-vibrated composite polishing: (a) Polished initial state; (b) Polishing process under vibration; (c) Polishing process under photocatalytic conditions; (d) Polishing process under the combined action of vibration and photocatalysis
Fig. 3. SiC processing process diagram: (a) Machining process under vibration conditions; (b) Photocatalytic-vibrated composite processing process; (c) Vibration signal driver diagram
Fig. 5. Effect drawing of SiC polished surface: (a) SiC surface after rough polishing; (b) SiC surface under photocatalytic conditions; (c) SiC surfaces under photocatalytic and vibrational conditions
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Baojun Yu, Zhuoyi Guo, Faxiang Lu, Yan Gu, Jieqiong Lin. Ultraviolet photocatalytic-vibrated composite polishing[J]. Infrared and Laser Engineering, 2022, 51(11): 20220138
Category: Materials & Thin films
Received: Mar. 4, 2022
Accepted: --
Published Online: Feb. 9, 2023
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