[1] [1] WANG Pan, LU Qibing, FAN Zhun. Evolutionary design optimization of MEMS: a review of its history and state-of-the-art［J］. Cluster Computing, 2019, 22（4）: 9105-9111.

[5] [5] CHEN Lijie, ZHANG Peng, XU Xingye, et al. Overview of vector hydrophone［J］. Transducer and Microsystem Technologies, 2006, 25（6）: 5-8.

[7] [7] WANG Yan, LIU Mengran, ZHANG Guojun. The design of composite MEMS hydrophone［J］. Piezoelectrics & Acoustooptics, 2017, 39（2）: 243-247.

[9] [9] QI Bingnan, MIAO Jinwei, SHI Yiming, et al. Piezoresistive integrated vector hydrophone based on MEMS［J］. Micronanoelectronic Technology, 2021, 58（8）: 693-699.

[11] [11] HE Jian, WANG Erwei, CHOU Xiujian. Design and study on a piezoelectric cross-shaped MEMS vector bionic hydrophone［J］. Piezoelectrics & Acoustooptics, 2017, 39（2）: 239-242.

[12] [12] DENG Wei, FAN Qingqing, LI Junhong, et al. Low noise preamplifier circuit for MEMS piezoelectric vector hydrophone［J］. Piezoelectrics & Acoustooptics, 2024, 46（4）: 550-554.

[13] [13] BAI Bing, REN Ziming, DING Junwen, et al. Cross-supported planar MEMS vector hydrophone for high impact resistance［J］. Sensors and Actuators A: Physical, 2017, 263: 563-570.

[14] [14] WANG R, SHEN W, ZHANG W, et al. Des-ign and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low- frequency detection［J］. Microsyst Nanoeng, 2021, 7: 1.

[15] [15] ZHANG Wenjun, HAO Congcong, ZHANG Zengxing, et al. Vector high-resolution marine turbulence sensor based on a MEMS bionic cilium-shaped structure［J］.IEEE Sensors Journal, 21（7）: 8741-8750.

[24] [24] LI Junhong, MA Jun, WEI Jianhui, et al. Research progress of MEMS piezoelectric hydrophone and vector hydrophone［J］. Journal of Applied Acoustics, 2018, 37（1）: 101-105.