Amplitude-Frequency Characteristics Testing of the Diaphragm Structure in Piezoelectric MEMS Hydrophones

SONG Chenyang; LI Jianyou; LI Guanhua; LI Genzi

doi:10.11977/j.issn.1004-2474.2025.02.020

Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 319(2025)

Amplitude-Frequency Characteristics Testing of the Diaphragm Structure in Piezoelectric MEMS Hydrophones

SONG Chenyang¹, LI Jianyou², LI Guanhua³, and LI Genzi¹

¹Yanqi Lake Institute of Basic Manufacturing Technology （Beijing） Co., Ltd.Beijing Key Laboratory of Reliability Technology for High-End MEMS Devices, Beijing 101407, China

²China Academy of Machinery Science and Technology Group Co., Ltd., Beijing 100048, China

³Anhui Orinfin Acoustic Science and Technology Co., Ltd., Hefei 230088, China

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SONG Chenyang, LI Jianyou, LI Guanhua, LI Genzi. Amplitude-Frequency Characteristics Testing of the Diaphragm Structure in Piezoelectric MEMS Hydrophones[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 319

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Paper Information

Received: Jan. 10, 2025

Accepted: Jun. 17, 2025

Published Online: Jun. 17, 2025

The Author Email:

DOI:10.11977/j.issn.1004-2474.2025.02.020

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology