High-Resolution White Light Interferometry Based on Scanning Error Correction

Changsheng Ji; Songjie Luo; Ziyang Chen; Zihao Wu; Jixong Pu

doi:10.3788/LOP241250

Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312003(2025)

High-Resolution White Light Interferometry Based on Scanning Error Correction

Changsheng Ji^1、*, Songjie Luo¹, Ziyang Chen¹, Zihao Wu², and Jixong Pu³

¹Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen 361021, Fujian ,China

²Suzhou Institute of Biomedical Engineering and Technology Chinese Academy of Sciences, Suzhou 215163, Jiangsu , China

³New Engineering Industry College, Putian University, Putian 351100, Fujian , China

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References(23)

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Changsheng Ji, Songjie Luo, Ziyang Chen, Zihao Wu, Jixong Pu. High-Resolution White Light Interferometry Based on Scanning Error Correction[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: May. 10, 2024

Accepted: May. 28, 2024

Published Online: Feb. 10, 2025

The Author Email:

DOI:10.3788/LOP241250

CSTR:32186.14.LOP241250

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology