High-Resolution White Light Interferometry Based on Scanning Error Correction

Changsheng Ji; Songjie Luo; Ziyang Chen; Zihao Wu; Jixong Pu

doi:10.3788/LOP241250

Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312003(2025)

High-Resolution White Light Interferometry Based on Scanning Error Correction

Changsheng Ji^1、*, Songjie Luo¹, Ziyang Chen¹, Zihao Wu², and Jixong Pu³

¹Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen 361021, Fujian ,China

²Suzhou Institute of Biomedical Engineering and Technology Chinese Academy of Sciences, Suzhou 215163, Jiangsu , China

³New Engineering Industry College, Putian University, Putian 351100, Fujian , China

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Figures & Tables(13)

Fig. 1. Schematic of white-light scanning interferometer

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Fig. 2. Process of white light interference signal correction. (a) Flowchart; (b) schematic diagram

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Fig. 3. Interference signal generation. (a) Spectrum of light source; (b) vibrational noise; (c) nonlinear movement of PZT; (d) white light interference signal; (d) monochromatic interference signal

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Fig. 4. White light interference signal correction. (a) Phase noise obtained from Fig. 3(e); (b) corrected white light interference signal

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Fig. 5. Measurement errors in a single measurement. (a) Schematic of 100 different positions; (b) measurement errors obtained by z_s and z_p from original white light interference signal; (c) measurement errors obtained by z_s and z_p from corrected white light interference signal

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Fig. 6. Measurement error caused by the different phase noise distribution. (a) Measurement errors obtained by z_s and z_p from original white light interference signal; (b) measurement errors obtained by z_s and z_p from corrected white light interference signal

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Fig. 7. Diagram of experimental white light scanning interferometer

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Fig. 8. Correction of white light interference signal. (a) Original white light interference signal; (b) monochromatic interference signal; (c) phase noise; (d) corrected white light interference signal

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Fig. 9. Surface profile of the wedged window. (a) Surface profile obtained through z_s from the original white light interference signal; (b) surface profile obtained through z_p from the original white light interference signal; (c) surface profile obtained through z_s from the corrected white light interference signal; (d) surface profile obtained through z_p from the corrected white light interference signal

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Fig. 10. The surface distribution at X=25 along the Y direction obtained from three measurements. (a) Surface profile obtained through z_s from the original white light interference signal; (b) surface profile obtained through z_p from the original white light interference signal; (c) surface profile obtained through z_s from the corrected white light interference signal; (d) surface profile obtained through z_p from the corrected white light interference signal

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Fig. 11. Surface profile with the step shape. (a) Surface profile obtained through z_s from the original white light interference signal; (b) surface profile obtained through z_p from the original white light interference signal; (c) surface profile obtained through z_s from the corrected white light interference signal; (d) surface profile obtained through z_p from the corrected white light interference signal

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Table 1. Standard deviation of measurement error caused by phase noise with different magnitude
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Table 1. Standard deviation of measurement error caused by phase noise with different magnitude
STD of noise 10 20 30 40 50
Original WLIS STD of z_s 11.8 27.7 48.4 60.9 81.1
STD of z_p 5.6 11.9 19.0 24.6 32.3
Corrected WLIS STD of z_s 0.3 0.7 1.4 2.7 8.3
STD of z_p 0.0 0.1 0.2 0.4 0.6

Table 2. Root mean square S_q and maximum height S_z of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm
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Table 2. Root mean square S_q and maximum height S_z of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm
Roughness Original WLIS Corrected WLIS
z_s z_p z_s z_p
S_q 9.5 1.9 6.3 1.0
S_z 11.6 2.4 7.8 1.3

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Changsheng Ji, Songjie Luo, Ziyang Chen, Zihao Wu, Jixong Pu. High-Resolution White Light Interferometry Based on Scanning Error Correction[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: May. 10, 2024

Accepted: May. 28, 2024

Published Online: Feb. 10, 2025

The Author Email:

DOI:10.3788/LOP241250

CSTR:32186.14.LOP241250

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Standard deviation of measurement error caused by phase noise with different magnitude

Table 1. Standard deviation of measurement error caused by phase noise with different magnitude

Table 2. Root mean square Sq and maximum height Sz of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm

Table 2. Root mean square Sq and maximum height Sz of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm

Table 2. Root mean square S_q and maximum height S_z of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm

Table 2. Root mean square S_q and maximum height S_z of the surface profile of the wedged window obtained from the original and corrected white light interference signals unit: nm