Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312003(2025)

High-Resolution White Light Interferometry Based on Scanning Error Correction

Changsheng Ji1、*, Songjie Luo1, Ziyang Chen1, Zihao Wu2, and Jixong Pu3
Author Affiliations
  • 1Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen 361021, Fujian ,China
  • 2Suzhou Institute of Biomedical Engineering and Technology Chinese Academy of Sciences, Suzhou 215163, Jiangsu , China
  • 3New Engineering Industry College, Putian University, Putian 351100, Fujian , China
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    A scanning error correction method is proposed to eliminate phase errors in white light scanning interferometry, addressing the limited measurement accuracy caused by inexact phase shift. Adding a monochromatic light interference signal detection device to a white light scanning interferometer allows the collected monochromatic signal to share the same phase error as the white light signal. The phase error obtained from the monochromatic light interference signal was used to correct the white light signal. The effectiveness of the scanning error correction method was verified through simulations and experiments on the roughness of a measurement surface and the repeatability of multiple measurements. This method further improves measurement accuracy based on the wavenumber domain phase compensation method proposed by our research group and enables the white light interferometer to adapt to noisy working environments.

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    Changsheng Ji, Songjie Luo, Ziyang Chen, Zihao Wu, Jixong Pu. High-Resolution White Light Interferometry Based on Scanning Error Correction[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 10, 2024

    Accepted: May. 28, 2024

    Published Online: Feb. 10, 2025

    The Author Email:

    DOI:10.3788/LOP241250

    CSTR:32186.14.LOP241250

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