Laser & Optoelectronics Progress, Volume. 59, Issue 17, 1722006(2022)

Model Predictive Thermal Control Method for Precision Lens System

Shuo Qin1,2、*
Author Affiliations
  • 1Department of Avionics, Air Force Aviation Maintenance Technical College, Changsha 410200, Hunan , China
  • 2Aviation Electronic Maintenance Laboratory, Aircraft Maintenance Engineering Technology Research Center of Hunan Province, Changsha 410200, Hunan , China
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    References(21)

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    [4] Peng H F, Yu X F, Qin S. Design and performance testing of constant-temperature water jacket small-scale model of lithographic projection lens[J]. Laser & Optoelectronics Progress, 53, 081201(2016).

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    [21] Xu J C, Xia Z X, Chen P et al. Modeling of hollow ring laser heat source and finite element simulation of temperature field[J]. Chinese Journal of Lasers, 48, 1701003(2021).

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    Shuo Qin. Model Predictive Thermal Control Method for Precision Lens System[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1722006

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Dec. 15, 2021

    Accepted: Apr. 7, 2022

    Published Online: Aug. 22, 2022

    The Author Email: Shuo Qin (qinshuo666@163.com)

    DOI:10.3788/LOP202259.1722006

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