Fig. 1. Basic structure of the model predictive controller

Fig. 2. Pseudo random input and output signal of precision lens system

Fig. 3. Autocorrelation analysis curve of pseudo random thermal disturbance input signal

Fig. 4. Structure of the thermal control experimental platform

Fig. 5. Physical map of the high precision temperature control experimental platform

Fig. 6. Structure diagram of lens system and cooling water jacket. (a) Structure of precision lens system; (b) appearance drawing of the cooling water jacket

Fig. 7. Schematic diagram of the temperature sensor. (a) Installation position of the sensor; (b) installation method of the sensor

Fig. 8. Experimental scene diagram

Fig. 9. Temperature curve of the temperature control point of the lens system. (a) Experiment 1; (b) experiment 2

Fig. 10. Variation trend of Z₄ in the wave aberration of the lens system. (a) Experiment 1; (b) experiment 2