Chinese Optics Letters, Volume. 23, Issue 3, 031202(2025)

4H-SiC-based soft X-ray single photon detector with linear photon energy response

Hao Qu1, Weizong Xu1,2、*, Jiuzhou Zhao1, Dong Zhou1, Fangfang Ren1,2, Feng Zhou1, Dunjun Chen1, Rong Zhang1,2, Youliao Zheng1, and Hai Lu1,2、**
Author Affiliations
  • 1Key Laboratory of Optoelectronic Devices and Systems with Extreme Performances of MOE, Collaborative Innovation Center of Advanced Microstructures, School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
  • 2Hefei National Laboratory, Hefei 230088, China
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    [11] R. Korde, L. Randall Canfield. Silicon photodiodes with stable, near-theoretical quantum efficiency in the soft x-ray region. X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation(1989).

    [17] O. Karadavut, S. K. Chaudhuri, J. W. Kleppinger et al. Performance-improved vertical Ni/SiO2/4H-SiC metal–oxide–semiconductor capacitors for high-resolution radiation detection. IEEE Trans. Nucl. Sci., 69, 1965(2022).

    [22] G. E. Stillman, C. M. Wolfe. Avalanche photodiodes. Semiconductors and Semimetals, 291(1977).

    [25] S. Capra, A. Pullia. Study of the effects of parasitic capacitance on large integrated feedback resistors for charge-sensitive preamplifiers. 2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)(2014).

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    Hao Qu, Weizong Xu, Jiuzhou Zhao, Dong Zhou, Fangfang Ren, Feng Zhou, Dunjun Chen, Rong Zhang, Youliao Zheng, Hai Lu, "4H-SiC-based soft X-ray single photon detector with linear photon energy response," Chin. Opt. Lett. 23, 031202 (2025)

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    Paper Information

    Category: Instrumentation, Measurement, and Optical Sensing

    Received: Jul. 31, 2024

    Accepted: Sep. 24, 2024

    Published Online: Apr. 1, 2025

    The Author Email: Weizong Xu (wz.xu@nju.edu.cn), Hai Lu (hailu@nju.edu.cn)

    DOI:10.3788/COL202523.031202

    CSTR:32184.14.COL202523.031202

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