[1] [1] ZHANG G X. Coordinate Measuring Machine［M］. Tianjin: Tianjin University Press, 1999. (in Chinese)

[2] [2] WANG C C. Study on the structural principle and error correction technology of the different types of CMM ［D］. Hefei: Hefei University of Technology , 2012. (in Chinese)

[3] [3] SHI Z Y, ZHANG B, FEI Y T. Re-visit to the Abbe Principle ［J］. Chinese Journal of Scientific Instrument, 2012, 3(5): 1128-1133. (in Chinese)

[4] [4] WANG W L, FAN G Z, LIU Y S. Precision measurement system based on coplanar XY-stage ［J］. Journal of China University of Metrology, 2005, 16(4): 264-267. (in Chinese)

[5] [5] LI G, WANG B, DONG SH, et al.. Design and control of dual-stage feed drive system in ultra-precision machine tools ［J］. Opt. Precison Eng., 2009, 17(6): 1426-1430.(in Chinese)

[6] [6] WANG J W, CHEN K, LI J, et al. Precision of typical flexible hinges ［J］. Journal of Tsinghua University:Science and Technology, 2001, 41(11):49-52. (in Chinese)

[7] [7] WANG J J, PEI X, BI S S, et al.. State-of-arts of design method for flexure mechanisms ［J］. Journal of Mechanical Engineering, 2010,46(13):2-13. (in Chinese)

[8] [8] ZHANG T, SUN L N. Research on basic characteristics of piezoelectric ceramics ［J］. Opt. Precision Eng.,1998,6(4):26-32. (in Chinese)

[9] [9] WANG L, RAO C H, RAO X J. Feed-forward control of piezoelectric ceramic positioning stage ［J］. Opt. Precision Eng.,2012,20(6):1265-1271. (in Chinese)