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Optics and Precision Engineering, Volume. 21, Issue 7, 1811(2013)

Large stroke 2-DOF nano-positioning stage with angle error correction

ZHANG Xi-feng*, HUANG Qiang-xian, YUAN Yu, and HUANG Shuai
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    ZHANG Xi-feng, HUANG Qiang-xian, YUAN Yu, HUANG Shuai. Large stroke 2-DOF nano-positioning stage with angle error correction[J]. Optics and Precision Engineering, 2013, 21(7): 1811

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    Received: Jan. 6, 2013

    Accepted: --

    Published Online: Aug. 5, 2013

    The Author Email: ZHANG Xi-feng (zhangxf_hfut@163.com)

    DOI:10.3788/ope.20132107.1811

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology