Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer

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Chen Benyong, Mu Ruizhen, Zhou Yanjiang, Li Dacheng. Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer[J]. Chinese Journal of Lasers, 2008, 35(2): 240

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Paper Information

Category: measurement and metrology

Received: Jul. 20, 2007

Accepted: --

Published Online: Mar. 5, 2008

The Author Email: Benyong Chen (chenby@zstu.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology