Chinese Journal of Lasers, Volume. 35, Issue 2, 240(2008)

Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer

Chen Benyong1、*, Mu Ruizhen1, Zhou Yanjiang1, and Li Dacheng2
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    Chen Benyong, Mu Ruizhen, Zhou Yanjiang, Li Dacheng. Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer[J]. Chinese Journal of Lasers, 2008, 35(2): 240

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    Paper Information

    Category: measurement and metrology

    Received: Jul. 20, 2007

    Accepted: --

    Published Online: Mar. 5, 2008

    The Author Email: Benyong Chen (chenby@zstu.edu.cn)

    DOI:

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