Semiconductor Optoelectronics, Volume. 46, Issue 4, 624(2025)
Preparation and Mechanism of Thin-Film Transistors Based on a New Tantalum-Doped HfO2 Dielectric Layer
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LIU Yu, HU Mengzhen, SONG Zengcai, ZHANG Dong. Preparation and Mechanism of Thin-Film Transistors Based on a New Tantalum-Doped HfO2 Dielectric Layer[J]. Semiconductor Optoelectronics, 2025, 46(4): 624
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Received: Apr. 15, 2025
Accepted: Sep. 18, 2025
Published Online: Sep. 18, 2025
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