Approach for Measuring Surface Density of Metal Thin Films Based on Full Range Fitting of X-Ray Absorption Spectra

Shuoran Wang; Zhihong Yan; Yichen Sun; Qi Wang; Shouhua Luo

doi:10.3788/LOP230506

Laser & Optoelectronics Progress, Volume. 61, Issue 5, 0512003(2024)

Approach for Measuring Surface Density of Metal Thin Films Based on Full Range Fitting of X-Ray Absorption Spectra

Shuoran Wang¹, Zhihong Yan¹, Yichen Sun¹, Qi Wang^2、**, and Shouhua Luo^1、*

Author Affiliations

¹School of Bioscience and Medical Engineering, Southeast University, Nanjing 210096, Jiangsu, China

²Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China

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Figures & Tables(13)

Fig. 1. Schematic of energy spectra and attenuation coefficient curve. (a) Ray source background energy spectrum; (b) absorption spectrum of Cu film; (c) attenuation coefficient curve of Cu element

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Fig. 2. Schematic of the measurement

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Fig. 3. Main structure diagram of absorption spectrometer. (a) Main view of the schematic; (b) left view of the schematic; (c) physical map

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Fig. 4. Outline diagram of absorption spectrometer

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Fig. 5. Schematic of surface density measurement

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Fig. 6. Fluorescence spectrum of Cu-Mo elements

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Fig. 7. Effect of bias voltage on energy spectrum

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Fig. 8. Fitting results of absorption spectra of Cu sample

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Fig. 9. Fitting results of absorption spectra of 12 μm Cu+9 μm Nb

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Fig. 10. Fitting results of absorption spectra of 12 μm Cu+4 μm W

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Table 1. Fitting results of absorption spectra of Cu films

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Table 1. Fitting results of absorption spectra of Cu films

Reference area density /（10^-2 g·cm^-2）	Measured area density /（10^-2 g·cm^-2）					Average value /（10^-2 g·cm^-2）	Relative error	Repetitive error /（10^-5 g·cm^-2）
2.0132	2.0253	2.0155	2.0182	2.0226	2.0209	2.0185	0.00266	4.1289
2.0132	2.0209	2.0155	2.0120	2.0119	2.0146	2.0185	0.00266	4.1289

Table 2. Edge position of K of Cu and other metal elements
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Table 2. Edge position of K of Cu and other metal elements
Element E /keV μ_a /（cm²·g^-1） μ_b /（cm²·g^-1）
Cu 8.912 41.5 294.0
Nb 18.623 15.4 85.0
W 10.010 98.3 243.0

Table 3. Source and magnitude of uncertainty

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Table 3. Source and magnitude of uncertainty

Standard uncertainty component	Source of uncertainty	Standard uncertainty /（g·cm^-2）	Sensitivity coefficient
u_m	Spectrum fitting error	$5.3134 \times 10^{- 5}$	1
u_t	Sample intrinsic error	$2.0093 \times 10^{- 5}$	1
u_random	Measurement repeatability	$4.1257 \times 10^{- 5}$	1

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Shuoran Wang, Zhihong Yan, Yichen Sun, Qi Wang, Shouhua Luo. Approach for Measuring Surface Density of Metal Thin Films Based on Full Range Fitting of X-Ray Absorption Spectra[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0512003

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