Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu; Nan Zhang; Mingwei Wang; Xiaonong Zhu

doi:10.3788/col201109.093201

Chinese Optics Letters, Volume. 9, Issue 9, 093201(2011)

Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu, Nan Zhang, Mingwei Wang, and Xiaonong Zhu

Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China

show less

References(29)

[1] [1] B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. T unnermann, Appl. Phys. A 63, 109 (1996).

[2] [2] Y. Wu, C. Wang, W. Jia, X. Ni, M. Hu, and L. Chai, Chin. Opt. Lett. 6, 51 (2008).

[3] [3] Y. Li, H. Jiang, H. Yang, and Q. Gong, Chin. Opt. Lett. 3, (suppl.) 200 (2008).

[4] [4] Y. Zhu, H. Mei, T. Zhu, J. Zhang, and S. Yin, Chin. Opt. Lett. 7, 675 (2009).

[5] [5] W. Jia, B. Zhou, X. Li, L. Chai, R. Zhang, and C. Wang, Chin. Opt. Lett. 8, 38 (2010).

[6] [6] Y. Zhang, X. Jia, P. Xiong, and T. Jia, Chin. Opt. Lett. 8, 1203 (2010).

[7] [7] E. Stratakis, M. Barberoglou, C. Fotakis, G. Viau, C. Garcia, and G. A. Shafeev, Opt. Express 17, 12650 (2009).

[8] [8] A. S. Mahmood, M. Sivakumar, K. Venkatakrishnan, and B. Tan, Appl. Phys. Lett. 95, 034107 (2009).

[9] [9] J. Perriμere, E. Millon, W. Seiler, C. Boulmer-Leborgne, V. Craciun, O. Albert, J. C. Loulergue, and J. Etchepare, J. Appl. Phys. 91, 690 (2002).

[10] [10] S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello, X. Wang, G. Ausanio, V. Iannotti, and L. Lanotte, Appl. Phys. Lett. 84, 4502 (2004).

[11] [11] S. Amoruso, R. Bruzzese, X. Wang, and J. Xia, Appl. Phys. Lett. 92, 041503 (2008).

[12] [12] M. Lenner, A. Kaplan, Ch. Huchon, and R. E. Palmer, Phys. Rev. B 79, 184105 (2009).

[13] [13] K. Oguri, Y. Okano, T. Nishikawa, and H. Nakano, Phys. Rev. B 79, 144106 (2009).

[14] [14] N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, Phys. Rev. Lett. 99, 167602 (2007).

[15] [15] X. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).

[16] [16] X. Wang, T. Jia, X. Li, C. Li, D. Feng, H. Sun, S. Xu, and Z. Xu, Chin. Opt. Lett. 3, 615 (2005).

[17] [17] T. Wu, C. Zhou, E. Dai, and J. Xie, Chin. Opt. Lett. 7, 653 (2009).

[18] [18] C. T. Hebeisen, G. Sciaini, M. Harb, R. Ernstorfer, S. G. Kruglik, and R. J. D. Miller, Phys. Rev. B 78, 081403 (R) (2008).

[19] [19] D. Perez and L. J. Lewis, Phys. Rev. B 67, 184102 (2003).

[20] [20] X. Liu and Y. Wang, Chin. Opt. Lett. 3, 57 (2005).

[21] [21] W. G. Roeterdink, L. B. F. Juurlink, O. P. H. Vaughan, J. Dura Diez, M. Bonn, and A. W. Kleyn, Appl. Phys. Lett. 82, 4190 (2003).

[22] [22] P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. Lett. 91, 225502 (2003).

[23] [23] F. Vidal, T. W. Johnston, S. Laville, O. Barth elemy, M. Chaker, B. Le Drogoff, J. Margot, and M. Sabsabi, Phys. Rev. Lett. 86, 2573 (2001).

[24] [24] D. Perez and L. J. Lewis, Phys. Rev. Lett. 89, 255504 (2002).

[25] [25] X. Wang and X. Xu, J. Thermal Stresses, 25, 457 (2002).

[26] [26] Z. Wu, X. Zhu, and N. Zhang, J. Appl. Phys. 109, 053113 (2011).

[27] [27] G. Callies, P. Berger, and H. Hugel, J. Phys. D 28, 794 (1995).

[28] [28] E. G. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. L. Davies, L. Hallo, P. Nicolai, and V. T. Tikhonchuk, Phys. Rev. B 73, 214101 (2006).

[29] [29] C. Cheng and X. Xu, Phys. Rev. B 67, 165415 (2005).