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Chinese Optics Letters, Volume. 9, Issue 9, 093201(2011)

Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu, Nan Zhang, Mingwei Wang, and Xiaonong Zhu
Author Affiliations
  • Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China
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    Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.
    The article is cited by 22 article(s) from Web of Science.
    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu, "Femtosecond laser ablation of silicon in air and vacuum," Chin. Opt. Lett. 9, 093201 (2011)

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    Paper Information

    Category: Ultrafast Optics

    Received: Mar. 18, 2011

    Accepted: Apr. 11, 2011

    Published Online: Jul. 29, 2011

    The Author Email:

    DOI:10.3788/col201109.093201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology