Fig. 1. Vertical antiblooming structure of EMCCD

Fig. 2. 1280 × 1024 EMCCD structure design. (a) 1280 × 1024 EMCCD device structure; (b) Simplified pixel structure with antiblooming function; (c) Pixel two-dimensional model

Fig. 3. (a) Pixel integration and (b) pixel antiblooming

Fig. 4. Cross-section of 1280×1024 EMCCD pixel

Fig. 5. Designed 1280×1024 EMCCD. (a) Scanning electron microscope of pixel; (b) Packaged device

Fig. 6. Antiblooming factor curve of EMCCD as a function of substrate voltage

Fig. 7. 1280 × 1024 EMCCD principle prototype

Fig. 8. Imaging effect of EMCCD antiblooming. (a)-(h) Antiblooming off; (i)-(l) Antiblooming on