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Microelectronics, Volume. 51, Issue 2, 270(2021)

Research on Key Electrical Parameters’ Testing Technology of 2.5D Silicon Interposer

LIU Yukui1, CUI Wei1,2, MAO Ruyan1, SUN Shi3, and YIN Wanjun1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    LIU Yukui, CUI Wei, MAO Ruyan, SUN Shi, YIN Wanjun. Research on Key Electrical Parameters’ Testing Technology of 2.5D Silicon Interposer[J]. Microelectronics, 2021, 51(2): 270

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    Paper Information

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    Received: Aug. 24, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200385

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology