Journal of Synthetic Crystals, Volume. 49, Issue 11, 2128(2020)
Progress in Homoepitaxial Growth of 4HSiC Semiconductor
4HSiC semiconductor is an ideal electronic material for high temperature, high frequency, and high power electronic devices. In recent 20 years, the material growth technology has been developed, and the quality of 4HSiC materials has been gradually improved. In this paper, the necessity of homoepitaxial growth of 4HSiC is briefly described. Then, several important aspects of the material science of 4HSiC, such as impurity doping, extended and point defects, and highspeed growth process are reviewed. At last, the current status of domestic 4HSiC epitaxy industrialization is introduced.
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FENG Gan, SUN Yongqiang, QIAN Weining, CHEN Zhixia. Progress in Homoepitaxial Growth of 4HSiC Semiconductor[J]. Journal of Synthetic Crystals, 2020, 49(11): 2128
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Published Online: Jan. 26, 2021
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