Chinese Journal of Lasers, Volume. 50, Issue 7, 0701007(2023)

Reflection Characteristics Analysis of DBR in 940 nm VCSEL

Zhipeng Pan1,2, Wei Li1、*, Lü Jiagang1,2, Jinyuan Chang1,2, Zhennuo Wang1,2, Suping Liu1, Li Zhong1, and Xiaoyu Ma1,2
Author Affiliations
  • 1National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences,Beijing 100049, China
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    Figures & Tables(11)
    Refractive index of AlxGaAs versus x at 940 nm wavelength
    Transmission matrix model of DBR multilayer dielectric film
    Transmission angle model of each layer in DBR structure
    Gradient DBR structures. (a) A pair of gradient DBR structures; (b) multilayer dissection equivalent model of Alx1-x2GaAs gradient layer
    Influence of different stacking methods on DBR reflectance spectrum
    Reflectivity versus period for DBR structure
    Relationship between reflection spectrum of DBR and incident angle
    Reflectance of DBR versus incident angle at center wavelength of 940 nm
    Reflectance spectra of different gradient DBR structures
    Maximum reflectances of DBRs under different gradient layer thicknesses
    • Table 1. Thickness of each part in gradient DBR structure

      View table

      Table 1. Thickness of each part in gradient DBR structure

      AlxGaAsD=0 nmD=10 nmD=20 nmD=30 nmD=40 nm
      Al0.89GaAs77.30 nm66.55 nm55.80 nm45.05 nm34.30 nm
      Al0.89-0.09GaAs0 nm10 nm20 nm30 nm40 nm
      Al0.09GaAs67.20 nm57.85 nm48.50 nm39.16 nm29.81 nm
      Al0.09-0.89GaAs0 nm10 nm20 nm30 nm40 nm
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    Zhipeng Pan, Wei Li, Lü Jiagang, Jinyuan Chang, Zhennuo Wang, Suping Liu, Li Zhong, Xiaoyu Ma. Reflection Characteristics Analysis of DBR in 940 nm VCSEL[J]. Chinese Journal of Lasers, 2023, 50(7): 0701007

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    Paper Information

    Category: laser devices and laser physics

    Received: Jul. 7, 2022

    Accepted: Aug. 10, 2022

    Published Online: Mar. 28, 2023

    The Author Email: Li Wei (liwei66@semi.ac.cn)

    DOI:10.3788/CJL221034

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