Surface Defect Detection Based on Scattering Field Distribution Fitting Approximation

Xiongxiao Wu; Hongjun Wang; Chen Wei; Ailing Tian; Bingcai Liu; Xueliang Zhu; Weiguo Liu

doi:10.3788/LOP202158.1112003

Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1112003(2021)

Surface Defect Detection Based on Scattering Field Distribution Fitting Approximation

Xiongxiao Wu^*, Hongjun Wang^**, Chen Wei, Ailing Tian, Bingcai Liu, Xueliang Zhu, and Weiguo Liu

Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Xi’an , Shaanxi 710021, China

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Figures & Tables(9)

Fig. 1. Detection principle of two-dimensional profile of surface defects

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Fig. 2. Flow chart for calculation of the defect width

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Fig. 3. Scattering field distribution of the pit with diameter of 10 μm

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Fig. 4. Scattering field distribution diagram after noise reduction. (a) Original image; (b) denoised image; (c) rotated image; (d) marked image

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Fig. 5. Scattering field distribution of 10 μm scratch. (a) Original image; (b) denoised image; (c) rotated image; (d) marked image

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Fig. 6. Scattering field distribution diagram of pit defect after noise reduction. (a) Diameter is 40.2 μm; (b) diameter is 10.1 μm

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Fig. 7. Scattering field distribution diagram of scratch defect after noise reduction

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Table 1. Fitting calculation results of pits with different diameters

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Table 1. Fitting calculation results of pits with different diameters

Nominal size /μm	White light interferometer size /μm	Fitting size /μm	Error value /μm	Relative error /%
10	10.1	9.8	0.3	2.97
20	20.1	19.2	0.9	4.47
30	30.1	31.4	1.3	4.32
40	40.2	41.8	1.6	3.98
50	50.3	51.5	1.2	2.38
60	60.1	58.6	1.5	2.49
70	70.2	71.6	1.6	2.28

Table 2. Fitting calculation result of the scratch

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Table 2. Fitting calculation result of the scratch

Nominal size /μm	White light interferometer size /μm	Fitting size /μm	Error value /μm	Relative error /%
10	10.2	10.5	0.3	2.94
20	20.1	21.3	1.2	5.97
30	30.1	29.8	0.3	0.99
40	40.2	41.6	1.4	3.48
50	50.1	51.2	1.1	2.19
60	60.3	58.4	1.9	3.15
70	70.2	72.3	2.1	2.99

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Xiongxiao Wu, Hongjun Wang, Chen Wei, Ailing Tian, Bingcai Liu, Xueliang Zhu, Weiguo Liu. Surface Defect Detection Based on Scattering Field Distribution Fitting Approximation[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1112003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Sep. 25, 2020

Accepted: Nov. 12, 2020

Published Online: Jun. 7, 2021

The Author Email: Xiongxiao Wu (w18091318348@163.com), Hongjun Wang (whj0253@sina.com)

DOI:10.3788/LOP202158.1112003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology