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Acta Optica Sinica, Volume. 36, Issue 12, 1205001(2016)

Simulation Analysis on Influencing Factors of Fringe Quality by Displacement Talbot Lithography

Deng Qian1,2, Zhao Lixin1, Tang Yan1, Yao Jingwei1,2, Liu Junbo1,2、*, and Hu Song1
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    Deng Qian, Zhao Lixin, Tang Yan, Yao Jingwei, Liu Junbo, Hu Song. Simulation Analysis on Influencing Factors of Fringe Quality by Displacement Talbot Lithography[J]. Acta Optica Sinica, 2016, 36(12): 1205001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jun. 16, 2016

    Accepted: --

    Published Online: May. 9, 2020

    The Author Email: Junbo Liu (ljbopt＠126.com)

    DOI:10.3788/aos201636.1205001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology