Acta Optica Sinica, Volume. 36, Issue 12, 1205001(2016)
Simulation Analysis on Influencing Factors of Fringe Quality by Displacement Talbot Lithography
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Deng Qian, Zhao Lixin, Tang Yan, Yao Jingwei, Liu Junbo, Hu Song. Simulation Analysis on Influencing Factors of Fringe Quality by Displacement Talbot Lithography[J]. Acta Optica Sinica, 2016, 36(12): 1205001
Category: Diffraction and Gratings
Received: Jun. 16, 2016
Accepted: --
Published Online: May. 9, 2020
The Author Email: Junbo Liu (ljbopt@126.com)