Fig. 1. Test samples

Fig. 2. Experimental equipment

Fig. 3. Schematic diagram of linear loading nano-scratche with edge forward

Fig. 4. Ultra-precision grinding equipment and method

Fig. 5. Load depth curves of nano-indentation

Fig. 6. Micro-mechanical properties of YAG

Fig. 7. Surface morphology of YAG quasi-static scratch groove

Fig. 8. Surface morphology of grinding test samples

Fig. 9. Surface roughness of grinding test samples

Fig. 10. Projection of actual contact area between Berkovich indenter and material during scratch

Fig. 11. Fitting curve of elastic recovery size effect

Fig. 12. Schematic diagram of cross section of surface deformation morphology

Fig. 13. Schematic diagram of abrasive cutting depth