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APPLIED LASER, Volume. 44, Issue 6, 60(2024)

Application of Laser Technology in Integrated Circuit Manufacturing in the Post-Moore Era

Chen Haipeng1 and Zhang Xuanjun2,3、*
Author Affiliations
  • 1Shanghai Institute for Science of Science, Shanghai 200031, China
  • 2Shanghai Institute of Laser Technology Co. Ltd., Shanghai 200233, China
  • 3Shanghai Engineering Research Center of Laser Intelligent Manufacturing, Shanghai 200233, China
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    Chen Haipeng, Zhang Xuanjun. Application of Laser Technology in Integrated Circuit Manufacturing in the Post-Moore Era[J]. APPLIED LASER, 2024, 44(6): 60

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    Paper Information

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    Received: Feb. 25, 2024

    Accepted: Dec. 13, 2024

    Published Online: Dec. 13, 2024

    The Author Email: Xuanjun Zhang (zxj@laser.net.cm)

    DOI:10.14128/j.cnki.al.20244406.060

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology