APPLIED LASER, Volume. 44, Issue 6, 60(2024)

Application of Laser Technology in Integrated Circuit Manufacturing in the Post-Moore Era

Chen Haipeng1 and Zhang Xuanjun2,3、*
Author Affiliations
  • 1Shanghai Institute for Science of Science, Shanghai 200031, China
  • 2Shanghai Institute of Laser Technology Co. Ltd., Shanghai 200233, China
  • 3Shanghai Engineering Research Center of Laser Intelligent Manufacturing, Shanghai 200233, China
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    As Moore′s Law nears its physical constraints, the pursuit of innovative techniques in integrated circuit (IC) fabrication intensifies, focusing on advanced processes and packaging methodologies. As a high-precision processing method without mechanical contact, laser technology has outstanding advantages in its micro-scale precise physical control capabilities. This paper delves into the diverse applications of laser technology within IC fabrication, including its pivotal role in EUV (extreme ultraviolet) lithography for advanced processes and its utilization in TSV (through dilicon vias), bonding/debonding, laser scribing, hidden cutting, and laser annealing—all of which are essential in advanced packaging technologies. This article summarizes the development prospects and challenges faced by laser technology in IC fabrication, points out the necessity of technological innovation and process improvement, and looks forward to how laser technology will help the IC industry achieve new breakthroughs and development.

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    Chen Haipeng, Zhang Xuanjun. Application of Laser Technology in Integrated Circuit Manufacturing in the Post-Moore Era[J]. APPLIED LASER, 2024, 44(6): 60

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    Paper Information

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    Received: Feb. 25, 2024

    Accepted: Dec. 13, 2024

    Published Online: Dec. 13, 2024

    The Author Email: Xuanjun Zhang (zxj@laser.net.cm)

    DOI:10.14128/j.cnki.al.20244406.060

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