Fig. 1. Principle diagram of digital holographic microscop

Fig. 2. Scanning path for subaperture image acquisition

Fig. 3. Subaperture stitching principle diagram

Fig. 4. Digital holographic detection device for optical component defects

Fig. 5. Scratch test results. (a) Scratch hologram; (b) spatial spectrum; (c) hologram without measured parts; (d) 2D picture of scratch; (e) cross-section of scratch; (f) 3D figure of scratch

Fig. 6. Subaperture defect holograms. (a) Subaperture 1; (b) subaperture 2; (c) subaperture 3; (d) subaperture 4

Fig. 7. 2D distributions of scratch depth in subaperture. (a) Subaperture 1; (b) subaperture 2; (c) subaperture 3; (d) subaperture 4

Fig. 8. 2D distribution of scratch depth after splicing

Fig. 9. 3D diagram of scratch after splicing