INFRARED, Volume. 46, Issue 7, 32(2025)

Study on the Influence of Indium Oxide on Flip-Chip Interconnect Quality and Its Removal Method

Hui WANG*, Xiao-yu FENG, Tian OUYANG, and Teng-da MA
Author Affiliations
  • North China Research Institute of Electro-Optics, Beijing 100015, China
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    Indium bumps (i.e. indium balls) used in flip-chip interconnection technology are a material used to achieve electrical connection between chips and substrates in semiconductor packaging. If the indium columns are left for too long after wet shrinkage, oxides will form on the surface of the indium balls. Indium oxides can be quickly identified using a metallographic microscope. The influence of the presence of indium oxides on the pressure and conductivity of flip-chip interconnection is analyzed and discussed, and wet and dry methods are proposed to remove oxides. The parameters of the removal method are quantitatively studied, and the removal effect is tested and analyzed, making the research conclusions more comprehensive and complete. The results show that the detectors after flip-chip interconnection of the circuit with oxides removed by this method have relatively stable performance, laying a good foundation for the preparation of high-quality and high-reliability detectors.

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    WANG Hui, FENG Xiao-yu, OUYANG Tian, MA Teng-da. Study on the Influence of Indium Oxide on Flip-Chip Interconnect Quality and Its Removal Method[J]. INFRARED, 2025, 46(7): 32

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    Paper Information

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    Received: Oct. 20, 2024

    Accepted: Aug. 12, 2025

    Published Online: Aug. 12, 2025

    The Author Email: WANG Hui (wh19800356080@163.com)

    DOI:10.3969/j.issn.1672-8785.2025.07.005

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