Chinese Journal of Liquid Crystals and Displays, Volume. 38, Issue 8, 1031(2023)

Research progress on crystalline IGZO thin film transistor

Bai-qi JIANG1, Bin LIU1, Xian-wen LIU1, Shuo ZHANG1, Le WENG1, Da-wei SHI2, Jian GUO2, Shun-kang SU2, Qi YAO3, Ce NING3, Guang-cai YUAN3, Feng WANG1, and Zhi-nong YU1、*
Author Affiliations
  • 1School of Optics and Photonics, Beijing Engineering Research Center of Mixed Reality and Advanced Display, Beijing Institute of Technology, Beijing 100081, China
  • 2Chongqing BOE Display Technology Co., Ltd., Chongqing 400714, China
  • 3Beijing BOE Display Technology Co., Ltd., Beijing 101520, China
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    With the development of display technology, the demand for high-performance and high-stability thin film transistors (TFTs) is increasing. The method of improving the performance of thin film transistors through crystallization has received a lot of attention. Currently, indium gallium zinc oxide (IGZO) materials are widely used in the channels of thin film transistors due to their advantages such as high mobility, flexibility, and high transparency. Improving the crystalline morphology of the IGZO channel layer has become a research hotspot. This article summarizes the research progress of crystalline IGZO thin film transistor devices, introduces in detail the crystal structure of IGZO compounds, and focuses on the structure of single crystalline, c-axis-aligned crystalline, hexagonal polycrystalline, spinel, nanocrystalline, and protocrystalline IGZO, as well as the preparation methods, device performance, and stability of various crystalline IGZO thin-film transistors. We also analyze the microstructure of crystalline IGZO, summarize the physical properties, describe the crystallization mechanism and establish the relationship between crystal structure and electrical properties. At last, the development of crystalline IGZO thin film transistor is prospected.

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    Bai-qi JIANG, Bin LIU, Xian-wen LIU, Shuo ZHANG, Le WENG, Da-wei SHI, Jian GUO, Shun-kang SU, Qi YAO, Ce NING, Guang-cai YUAN, Feng WANG, Zhi-nong YU. Research progress on crystalline IGZO thin film transistor[J]. Chinese Journal of Liquid Crystals and Displays, 2023, 38(8): 1031

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    Paper Information

    Category: Research Articles

    Received: Apr. 4, 2023

    Accepted: --

    Published Online: Oct. 9, 2023

    The Author Email: Zhi-nong YU (znyu@bit.edu.cn)

    DOI:10.37188/CJLCD.2023-0121

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