Optoelectronic Technology, Volume. 43, Issue 4, 351(2023)
Investigation and Research onThreshold Voltage in IGZO TFT Process
[5] Chen W T, Lo S Y, Kao S C et al. Oxygen-dependent instability and annealing/passivation effects in amorphous In-Ga-Zn-O thin-film transistors[J]. Electron Device Letters, 32, 1552-1554(2011).
[6] Yun M G, Kim S H, Ahn C H et al. Effects of channel thickness on electrical properties and stability of zinc tin oxide thin-film transistors[J]. Journal of Physics D: Applied Physics, 46, 475106(2013).
[7] Wang Y, Sun X W, Goh G K L et al. Influence of channel layer thickness on the electrical performances of inkjet-printed In-Ga-Zn oxide thin-film transistors[J]. IEEE, 58, 480-485(2011).
[8] Chen J, Wang L, Su X Q et al. Pulsed laser deposited InGaZnO thin film on silica glass[J]. Non-Cryst.Solids, 358, 2466-2469(2012).
[9] Mallory Mativenga, Dong Han Kang et al. Study of mechanism of stress-induced threshold voltage shift and recovery in top-gate amorphous — InGaZnO4 thin-film transistors with source and drain offsets[J]. Solid State Communications, 152, 1739-1743(2012).
[10] Nomura K, Ohta H, Takagi A et al. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors[J]. Nature, 432, 488-452(2004).
[11] Yabuta H, Sano M, Abe K et al. High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering[J]. Appl. Phys. Lett, 89(2006).
Get Citation
Copy Citation Text
Hui ZHAO, Yanchang WANG, Tao HUA. Investigation and Research onThreshold Voltage in IGZO TFT Process[J]. Optoelectronic Technology, 2023, 43(4): 351
Category:
Received: Feb. 27, 2023
Accepted: --
Published Online: Mar. 21, 2024
The Author Email: