Acta Optica Sinica, Volume. 45, Issue 1, 0112001(2025)

Analysis of Adhesive During Iterative Polishing of Transmission Flat on Vertical Interferometer

Jingjing Li1, Donghui Zheng1、*, Yuqing Liu1, Lei Chen1, Chen Xu2, and Xinyi Yu3
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu , China
  • 2Nanjing Institute of Astronomical Optics & Technology, Chinese Academy of Sciences, Nanjing 210042, Jiangsu , China
  • 3University of Chinese Academy of Sciences (Nanjing), Nanjing 211135, Jiangsu , China
  • show less
    References(25)

    [4] Zhou D, Jiang S L, Sun G B et al. Study on continuation correction of ion beam polishing to remove border effect[J]. Laser & Optoelectronics Progress, 59, 1322004(2022).

    [15] Zhang Y F, Ji F, Lan H et al. Study on the thermal effect in the ion beam figuring[J]. Modern Manufacturing Engineering, 83-86(2013).

    [19] Feng R. Research on the influence of adhesive difference on the surface shape of opto-mechanical lenses[D](2022).

    [20] Yang L J. Study on the compensation technology of lens deformation caused by gravity[D](2014).

    [22] Chen Z N[M]. Principle and application of adhesive bonding(2023).

    [23] Malacara D[M]. Optical shop testing, 15-16(2012).

    [24] Ma Z Y, Chen L, Zheng D H et al. System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference[J]. Infrared and Laser Engineering, 51, 20210880(2022).

    [25] Chen J, Chen L, Wang C et al. Research on the establishment of liquid reference based on dynamic interferometer[J]. Optical Technique, 46, 684-689(2020).

    Tools

    Get Citation

    Copy Citation Text

    Jingjing Li, Donghui Zheng, Yuqing Liu, Lei Chen, Chen Xu, Xinyi Yu. Analysis of Adhesive During Iterative Polishing of Transmission Flat on Vertical Interferometer[J]. Acta Optica Sinica, 2025, 45(1): 0112001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 28, 2024

    Accepted: Aug. 21, 2024

    Published Online: Jan. 20, 2025

    The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)

    DOI:10.3788/AOS241223

    CSTR:32393.14.AOS241223

    Topics