Acta Optica Sinica, Volume. 45, Issue 1, 0112001(2025)
Analysis of Adhesive During Iterative Polishing of Transmission Flat on Vertical Interferometer
[4] Zhou D, Jiang S L, Sun G B et al. Study on continuation correction of ion beam polishing to remove border effect[J]. Laser & Optoelectronics Progress, 59, 1322004(2022).
[15] Zhang Y F, Ji F, Lan H et al. Study on the thermal effect in the ion beam figuring[J]. Modern Manufacturing Engineering, 83-86(2013).
[19] Feng R. Research on the influence of adhesive difference on the surface shape of opto-mechanical lenses[D](2022).
[20] Yang L J. Study on the compensation technology of lens deformation caused by gravity[D](2014).
[22] Chen Z N[M]. Principle and application of adhesive bonding(2023).
[23] Malacara D[M]. Optical shop testing, 15-16(2012).
[24] Ma Z Y, Chen L, Zheng D H et al. System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference[J]. Infrared and Laser Engineering, 51, 20210880(2022).
[25] Chen J, Chen L, Wang C et al. Research on the establishment of liquid reference based on dynamic interferometer[J]. Optical Technique, 46, 684-689(2020).
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Jingjing Li, Donghui Zheng, Yuqing Liu, Lei Chen, Chen Xu, Xinyi Yu. Analysis of Adhesive During Iterative Polishing of Transmission Flat on Vertical Interferometer[J]. Acta Optica Sinica, 2025, 45(1): 0112001
Category: Instrumentation, Measurement and Metrology
Received: Jun. 28, 2024
Accepted: Aug. 21, 2024
Published Online: Jan. 20, 2025
The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)
CSTR:32393.14.AOS241223