[1] Sato S, Hidai H, Matsusaka S et al. Drilling, bonding, and forming conductive path in the hole by laser percussion drilling[J]. Precision Engineering, 61, 147-151(2020).

[2] Schrauben J N. Laser ablation and seeding for the preparation of highly transparent copper conductive networks on glass[J]. Journal of Laser Micro, 14, 35-42(2019).

[3] Hao T T. Applications of focused-ion-beam/focused-electron-beam technology on the fabrication of nanodevices[D]. Beijing: University of Chinese Academy of Sciences(2018).

[4] He X L. Research on precision micro-hole machined by EDM-ECM combined processing[D]. Harbin: Harbin Institute of Technology(2012).

[5] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2, 219-225(2008).

[6] Sugioka K, Cheng Y. Ultrafast lasers: reliable tools for advanced materials processing[J]. Light: Science & Applications, 3, e149(2014).

[7] Sugioka K. Progress in ultrafast laser processing and future prospects[J]. Nanophotonics, 6, 393-413(2017).

[8] Li Z W, Lu H, Li Y W et al. Near-infrared light absorption enhancement in graphene induced by the tamm state in optical thin films[J]. Acta Optica Sinica, 39, 0131001(2019).

[9] Shao J D, Zhu M P, Li J P et al. Research progress on large size polarizer coating for inertial confinement fusion laser application[J]. Acta Optica Sinica, 39, 1000001(2019).

[10] He F, Cheng Y. Femtosecond laser micromachining: frontier in laser precision micromachining[J]. Chinese Journal of Lasers, 34, 595-622(2007).

[11] Wei C, Ma Y P, Han Y et al. Femtosecond laser processing of ultrahard materials[J]. Laser & Optoelectronics Progress, 56, 190003(2019).

[12] Amorim V A, Maia J M, Viveiros D et al. Loss mechanisms of optical waveguides inscribed in fused silica by femtosecond laser direct writing[J]. Journal of Lightwave Technology, 37, 2240-2245(2019).

[13] Li M K, Xiang X S, Zhou C H et al. Two-dimensional grating fabrication based on ultra-precision laser direct writing system[J]. Acta Optica Sinica, 39, 0905001(2019).

[14] Cao X W, Zhang L, Yu Y S et al. Application of micro-optical components fabricated with femtosecond laser[J]. Chinese Journal of Lasers, 44, 0102004(2017).

[15] Otuka A J G, Almeida J M P, Tribuzi V et al. Femtosecond lasers for processing glassy and polymeric materials[J]. Materials Research, 17, 352-358(2013).

[16] Kotz F, Risch P, Arnold K et al. Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass[J]. Nature Communications, 10, 1439(2019).

[17] Zhang X, Liu K, Wang M D et al. Etching technology for copper-clad laminates based on femtosecond laser[J]. Acta Optica Sinica, 39, 1214003(2019).

[18] Zhou P, Wang Y H, Zu C K et al. Research on low dielectric glass[J]. Materials Review, 30, 290-293(2016).

[19] Rihakova L, Chmelickova H. Laser micromachining of glass, silicon, and ceramics[J]. Advances in Materials Science and Engineering, 2015, 1-6(2015).

[20] Butkus S, Gaižauskas E. Ma cˇernyt e· L, et al. Femtosecond beam transformation effects in water, enabling increased throughput micromachining in transparent materials[J]. Applied Sciences, 9, 2405(2019).

[21] Butkus S. Rapid cutting and drilling of transparent materials via femtosecond laser filamentation[J]. Journal of Laser Micro, 9, 213-220(2014).

[22] Tan Y X, Chu W, Wang P et al. Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses[J]. Optical Materials Express, 9, 1971(2019).

[23] Xing S L, Liu L, Zou G S et al. Effects of femtosecond laser parameters on hole drilling of silica glass[J]. Chinese Journal of Lasers, 42, 0403001(2015).

[24] Bulushev E, Bessmeltsev V, Dostovalov A et al. High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser[J]. Optics and Lasers in Engineering, 79, 39-47(2016).

[25] Shi Y, Xu B, Wu D et al. Research progress on fabrication of functional microfluidic chips using femtosecond laser direct writing technology[J]. Chinese Journal of Lasers, 46, 1000001(2019).

[26] Mannion P T, Magee J, Coyne E et al. The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J]. Applied Surface Science, 233, 275-287(2004).

[27] Yin P Y. A study on ultrafast laser processing for transparent brittle materials[D]. Wuhan: Huazhong University of Science and Technology(2016).