Fig. 1. Experimental setup for fabrication of microgrooves on quartz glass surface

Fig. 2. Energy density distribution of Gaussian beam

Fig. 3. Single pulse etching morphology of quartz glass

Fig. 4. Fitting curve of single pulse etching of quartz glass

Fig. 5. Relationship between depth of microgrooves and single-pulse energy

Fig. 6. Relationship between width of microgrooves and single-pulse energy

Fig. 7. Relationship between depth of microgrooves and scanning speed

Fig. 8. Relationship between width of microgrooves and scanning speed

Fig. 9. Relationship between depth of microgrooves and scanning times

Fig. 10. Relationship between width of microgrooves and scanning times

Fig. 11. Single line etch with spiral etch CAD drawing

Fig. 12. Section morphology of microgroove at different scanning speeds