Microelectronics, Volume. 51, Issue 2, 281(2021)
Research and Manufacture of a 3D Vertical Structure Photodetector
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DAI Yonghong, TANG Zhengwei, LIU Xin, LI Yuxin. Research and Manufacture of a 3D Vertical Structure Photodetector[J]. Microelectronics, 2021, 51(2): 281
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Received: Nov. 12, 2020
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Published Online: Mar. 11, 2022
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