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Microelectronics, Volume. 51, Issue 2, 281(2021)

Research and Manufacture of a 3D Vertical Structure Photodetector

DAI Yonghong1, TANG Zhengwei2, LIU Xin3, and LI Yuxin2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DAI Yonghong, TANG Zhengwei, LIU Xin, LI Yuxin. Research and Manufacture of a 3D Vertical Structure Photodetector[J]. Microelectronics, 2021, 51(2): 281

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    Received: Nov. 12, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200525

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology