Optics and Precision Engineering, Volume. 20, Issue 5, 1076(2012)
Manufacture of low-g micro inertial switch utilizing SOI with double buried layers
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WANG Chao, WU Jia-li, CHEN Guang-yan. Manufacture of low-g micro inertial switch utilizing SOI with double buried layers[J]. Optics and Precision Engineering, 2012, 20(5): 1076
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Received: Jan. 20, 2012
Accepted: --
Published Online: Aug. 8, 2012
The Author Email: WANG Chao (wchao.lzms@gmail.com)
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