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Chinese Journal of Lasers, Volume. 46, Issue 2, 0204010(2019)

Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun Li1,2、*, Liyuan Gu1,2, Jingpei Hu1, Linglin Zhu1, Aijun Zeng1,2、*, and Huijie Huang1,2
Author Affiliations
  • 1 Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
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    Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration[J]. Chinese Journal of Lasers, 2019, 46(2): 0204010

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 13, 2018

    Accepted: Nov. 20, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204010

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology