Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 46, Issue 2, 0204010(2019)

Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun Li1,2、*, Liyuan Gu1,2, Jingpei Hu1, Linglin Zhu1, Aijun Zeng1,2、*, and Huijie Huang1,2
Author Affiliations
  • 1 Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (5)
    Equations (0)
    References (0)
    Tools
    Paper Information
    Topics
    Figures & Tables(5)
    Schematic of SPR-based imaging ellipsometer

    Fig. 1. Schematic of SPR-based imaging ellipsometer

    Download full size
    MOC for SPR generation based on cylindrical lens

    Fig. 2. MOC for SPR generation based on cylindrical lens

    Download full size
    Simulation results of reflectivity curves for Au films with different thicknesses. (a) Numerical simulation results of SPR generated by cylindrical lens with MOC; (b) reflectivity curves of two positions whose direction YY'is orthogonal to cylinder axis, respectively

    Fig. 3. Simulation results of reflectivity curves for Au films with different thicknesses. (a) Numerical simulation results of SPR generated by cylindrical lens with MOC; (b) reflectivity curves of two positions whose direction YY'is orthogonal to cylinder axis, respectively

    Download full size
    Experimental setup. (a) Imaging ellipsometer; (b) Au film sample for SPR generation by cylindrical lens with MOC

    Fig. 4. Experimental setup. (a) Imaging ellipsometer; (b) Au film sample for SPR generation by cylindrical lens with MOC

    Download full size
    Measured results of SPR for Au films with different thicknesses. (a) Experimental results of SPR produced by cylindrical lens with MOC; (b) reflectivity curves of the No.3 line whose direction is orthogonal to cylinder axis

    Fig. 5. Measured results of SPR for Au films with different thicknesses. (a) Experimental results of SPR produced by cylindrical lens with MOC; (b) reflectivity curves of the No.3 line whose direction is orthogonal to cylinder axis

    Download full size
    Tools

    Get Citation

    Copy Citation Text

    Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration[J]. Chinese Journal of Lasers, 2019, 46(2): 0204010

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Sep. 13, 2018

    Accepted: Nov. 20, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204010

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology