Chinese Journal of Lasers, Volume. 46, Issue 2, 0204010(2019)

Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun Li1,2、*, Liyuan Gu1,2, Jingpei Hu1, Linglin Zhu1, Aijun Zeng1,2、*, and Huijie Huang1,2
Author Affiliations
  • 1 Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
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    Based on the surface plasmon resonance (SPR) effect caused by a modified Otto structure of cylindrical lens, a method for measuring the thickness of metallic thin films is proposed. For this proposed method, the background intensity can be fitted only with the single SPR absorption image obtained under the p-polarized light incidence, no need using the s-polarized light. Hence, the normalized reflectivity curve in the vertical direction is obtained. The reflectivity curve is fitted by establishing a model of the optical thin film and the thickness parameters of the metallic thin film are derived. In the experiment, a sample of Au film with a thickness in the nanometer range is measured. The measurement results show that the difference between the measured average thickness of Au film and the result obtained by commercial spectroscopic ellipsometer is only 0.1 nm, which verifies the effectiveness of this method.

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    Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration[J]. Chinese Journal of Lasers, 2019, 46(2): 0204010

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 13, 2018

    Accepted: Nov. 20, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204010

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