Fig. 1. Schematic of experimental setup for Nd3+∶YAG laser etching of glass

Fig. 2. Experimental method diagram of etching quartz glassby laser-induced chemical reactions of barium compounds

Fig. 3. SEM macro-topographies of micro-channels etched by two methods. (a) BaCrO4, front view; (b) Ba(OH)2, front view; (c) BaCrO4, cross-sectional view; (d) Ba(OH)2, cross-sectional view

Fig. 4. Micro-topographies on bottom surfaces of micro-channels etched by laser-induced chemical reactions. (a) BaCrO4; (b) Ba(OH)2

Fig. 5. EDSimages. (a) BaCrO4, area A; (b) BaCrO4, area B; (c) Ba(OH)2, area C

Fig. 6. XRD images of etching products in micro-channels etched by laser-induced chemical reactions of BaCrO4

Fig. 7. XRD images of etching products in micro-channels etched by laser-induced chemical reactions of BaCrO4