Researching | Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors

Chinese Journal of Lasers, Volume. 46, Issue 9, 910002(2019)

Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors

Hu Zhuoyue^1,2, Zhou Xiaodong³, Tang Yujun¹, and Chen Fansheng^1、*

Author Affiliations

¹Key Laboratory of Intelligent Infrared Perception, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Shanghai Academy of Spaceflight Technology, Shanghai 201109, China

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Fig. 1. Intra-pixel response test system

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Fig. 2. Internal structure of pixel

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Fig. 3. Normalized pixel response versus position of point target

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Fig. 4. Fitting and measured values of pixel response of point target imaging at different positions

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Table 1. Parameters obtained by fitting
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Table 1. Parameters obtained by fitting
Radius of hole /μm FWHM /μm a /μm b /μm c /μm d /μm r_es /%
37.5 6.535 18.0 13.5 18.0 18.5 8.74
65.0 7.948 18.5 12.5 18.5 15.0 9.68
65.0 8.066 18.0 16.0 19.5 16.0 10.39
65.0 8.184 18.5 16.5 19.0 17.0 8.65

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Hu Zhuoyue, Zhou Xiaodong, Tang Yujun, Chen Fansheng. Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors[J]. Chinese Journal of Lasers, 2019, 46(9): 910002

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Paper Information

Category: remote sensing and sensor

Received: Mar. 25, 2019

Accepted: --

Published Online: Sep. 10, 2019

The Author Email: Fansheng Chen (cfs@mail.sitp.ac.cn)

DOI:10.3788/CJL201946.0910002

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology