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Chinese Journal of Lasers, Volume. 36, Issue s2, 30(2009)

Effects of Residual Stress on the Performances of Electrostatically Actuated MEMS Micromirrors

Hu Fangrong1,2、*, Yao Jun1, and Chen Jianming3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Hu Fangrong, Yao Jun, Chen Jianming. Effects of Residual Stress on the Performances of Electrostatically Actuated MEMS Micromirrors[J]. Chinese Journal of Lasers, 2009, 36(s2): 30

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    Received: --

    Accepted: --

    Published Online: Dec. 30, 2009

    The Author Email: Hu Fangrong (hufangrong@sina.com)

    DOI:10.3788/cjl200936s2.0030

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology