Optics and Precision Engineering, Volume. 16, Issue 11, 2204(2008)
Laminated photoresist layer technology and residual stress control for micromirror fabrication
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LI Jia-dong, ZHANG Ping, WU Yi-hui, XUAN Ming, LIU Yong-shun, WANG Shu-rong. Laminated photoresist layer technology and residual stress control for micromirror fabrication[J]. Optics and Precision Engineering, 2008, 16(11): 2204
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Received: Apr. 7, 2008
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: LI Jia-dong (microsoft1224@163.com)
CSTR:32186.14.
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