Preparation of Deep Ultraviolet High-Steepness Filter Film

Yuanhao Cai; Xiuhua Fu; Zhaowen Lin; Ben Wang; Zhuobin Huang; Yonggang Pan; Suotao Dong; Guangyuan Fu

doi:10.3788/AOS231921

Acta Optica Sinica, Volume. 44, Issue 7, 0731001(2024)

Preparation of Deep Ultraviolet High-Steepness Filter Film

Yuanhao Cai^1,2, Xiuhua Fu^1,2、*, Zhaowen Lin^2,3, Ben Wang^2,3, Zhuobin Huang³, Yonggang Pan^2,3, Suotao Dong^2,3, and Guangyuan Fu^1,2

Author Affiliations

¹School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

²Zhongshan Institute of Changchun University of Science and Technology, Zhongshan 528437, Guangdong , China

³Zhongshan Gilion Optoelectronics Technology Co., Ltd., Zhongshan 528437, Guangdong , China

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Yuanhao Cai, Xiuhua Fu, Zhaowen Lin, Ben Wang, Zhuobin Huang, Yonggang Pan, Suotao Dong, Guangyuan Fu. Preparation of Deep Ultraviolet High-Steepness Filter Film[J]. Acta Optica Sinica, 2024, 44(7): 0731001

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Paper Information

Category: Thin Films

Received: Dec. 12, 2023

Accepted: Jan. 10, 2024

Published Online: Apr. 11, 2024

The Author Email: Xiuhua Fu (goptics@126.com)

DOI:10.3788/AOS231921

CSTR:32393.14.AOS231921

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