Semiconductor Optoelectronics, Volume. 45, Issue 2, 286(2024)
Error Compensation of Long Stroke Displacement Instrument Interference Ranging System
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WANG Yumeng, YANG Fan, CHEN Qingrong, YU Siyang, ZHANG Xi, SUN Si, YAN Wei. Error Compensation of Long Stroke Displacement Instrument Interference Ranging System[J]. Semiconductor Optoelectronics, 2024, 45(2): 286
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Received: Dec. 12, 2023
Accepted: --
Published Online: Aug. 14, 2024
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